FRANKFURT/TOKYO Japan's Nikon Corp on Monday said it has initiated legal action against ASML Holding NV and Carl Zeiss AG [CZTOP.UL], saying the Dutch and Germany companies used its lithography technology without its permission.
Nikon, the world's eighth-largest chip equipment maker, said it had filed patent infringement cases in the Netherlands, Germany and Japan against ASML, which makes semiconductor lithography machines, and Carl Zeiss, ASML's optical supplier.
ASML dominates the market for semiconductor lithography machines, which map out electronic circuits on silicon wafers.
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